Tailor-made precursors for the deposition of Sb-containing materials by the MOCVD process

Schuchmann, Daniella GND; Schwartz, Marcel GND; Schulz, Stephan GND; Seemayer, Andreas GND; Wandelt, Klaus GND

Crystalline GaSb films were deposited using tailor-made single source precursors [t-
BuB2BGaSbEtB2B]2 B in a specifically designed MOCVD reactor under HV conditions at low temperatures. In addition, tetraethyldistibine Sb2Et4 has been successfully used as precursor for the deposition of crystalline antimony films at low temperatures.

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Schuchmann, D., Schwartz, M., Schulz, S., Seemayer, A., Wandelt, K., 2020. Tailor-made precursors for the deposition of Sb-containing materials by the MOCVD process. https://doi.org/10.1016/j.jcrysgro.2008.07.038
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