Category

Date Created:

12.10.2004

Date submitted:

14.10.2004

Date of doctoral degree:

12.10.2004

URN:

urn:nbn:de:hbz:465-miless-011541-6

Language:

English

Type of Resource:

Text

Keywords:

1. rotational temperature

   Typ

   Schlagwort

1. degree of dissociation

   Typ

   Schlagwort

1. ICP

   Typ

   Schlagwort

1. RF discharges

   Typ

   Schlagwort

1. capacitive and inductive modes

   Typ

   Schlagwort

Dewey Decimal Classification:

530 Physics

Subject categories of the Deutsche Nationalbibliografie:

530 Physics

Hosting institution:

Faculty of Physics