Temperature and density measurements at an inductively RF excited hydrogen plasma discharge

Category

Date Created:

12.10.2004

Date submitted:

14.10.2004

Date of doctoral degree:

12.10.2004

URN:

urn:nbn:de:hbz:465-miless-011541-6

Language:

English

Type of Resource:

Text

Keywords:

rotational temperature; degree of dissociation; ICP; RF discharges; capacitive and inductive modes

Collection:

E-Dissertations

Dewey Decimal Classification:

530 Physics

Subject categories of the Deutsche Nationalbibliografie:

530 Physics

Hosting institution:

Fakultät für Physik