000K utf8 1100 2020$c2020-10-27 1500 eng 2050 urn:nbn:de:hbz:464-20201027-082457-6 2051 10.1016/j.jcrysgro.2008.07.114 3000 Seemayer, Andreas 3010 Hommes, Alexander 3010 Hümann, Sascha 3010 Schulz, Stephan 3010 Wandelt, Klaus 4000 Characterization of GaSb thin films from tailor-made single source precursors [Seemayer, Andreas] 4209 We investigated the growth and the surface properties of GaSb on Si(001) substrate by using a tailor-made fully-alkyl-substituted heterocyclic single-source precursor. The precursor properties during the evaporation process where monitored by RGA. The initial film growth was monitored by AES. Using a HV cold wall reactor, dense GaSb films could be produced and where characterized by AES, AFM and S-XPS. The results are discussed in terms of a correlation of the electronic and geometrical properties with the composition and structure of the films. 4950 https://doi.org/10.1016/j.jcrysgro.2008.07.114$xR$3Volltext$534 4950 https://nbn-resolving.org/urn:nbn:de:hbz:464-20201027-082457-6$xR$3Volltext$534 4961 https://duepublico2.uni-due.de/receive/duepublico_mods_00073139 5051 540 5550 A1. Surfaces A3. Low press. metalorganic vapor-phase epitaxy B1. Antimonides B2. Semiconducting III–V materials