@Article{duepublico_mods_00073139, author = {Seemayer, Andreas and Hommes, Alexander and H{\"u}mann, Sascha and Wandelt, Klaus and Schulz, Stephan}, title = {Characterization of GaSb thin films from tailor-made single source precursors}, year = {2020}, month = {Oct}, day = {27}, keywords = {A1. Surfaces A3. Low press. metalorganic vapor-phase epitaxy B1. Antimonides B2. Semiconducting III--V materials}, abstract = {We investigated the growth and the surface properties of GaSb on Si(001) substrate by using a tailor-made fully-alkyl-substituted heterocyclic single-source precursor. The precursor properties during the evaporation process where monitored by RGA. The initial film growth was monitored by AES. Using a HV cold wall reactor, dense GaSb films could be produced and where characterized by AES, AFM and S-XPS. The results are discussed in terms of a correlation of the electronic and geometrical properties with the composition and structure of the films.}, note = {<div>This is the <strong>"Authors Accepted Manuscript"</strong> of an article published in: Journal of Crystal Growth, Volume 310, Issue 23, 2008, Pages 4831-4834. Available online 7 August 2008.</div> <div>The final version may be found at: <a href="https://doi.org/10.1016/j.jcrysgro.2008.07.114">https://doi.org/10.1016/j.jcrysgro.2008.07.114</a></div>}, note = {Authors Accepted Manuscript.}, doi = {10.1016/j.jcrysgro.2008.07.114}, url = {https://duepublico2.uni-due.de/receive/duepublico_mods_00073139}, url = {https://doi.org/10.1016/j.jcrysgro.2008.07.114}, file = {:https://duepublico2.uni-due.de/servlets/MCRFileNodeServlet/duepublico_derivate_00072949/Accepted_Manuscript_JCrystGrowth_2008_310_4831.pdf:PDF}, language = {en} }